JPH0233258U - - Google Patents
Info
- Publication number
- JPH0233258U JPH0233258U JP10875888U JP10875888U JPH0233258U JP H0233258 U JPH0233258 U JP H0233258U JP 10875888 U JP10875888 U JP 10875888U JP 10875888 U JP10875888 U JP 10875888U JP H0233258 U JPH0233258 U JP H0233258U
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- forming apparatus
- film forming
- heating
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 5
- 239000010409 thin film Substances 0.000 claims description 4
- 230000007246 mechanism Effects 0.000 claims description 3
- 230000007723 transport mechanism Effects 0.000 claims 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
Landscapes
- Electrodes Of Semiconductors (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10875888U JPH0233258U (en]) | 1988-08-19 | 1988-08-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10875888U JPH0233258U (en]) | 1988-08-19 | 1988-08-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0233258U true JPH0233258U (en]) | 1990-03-01 |
Family
ID=31344394
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10875888U Pending JPH0233258U (en]) | 1988-08-19 | 1988-08-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0233258U (en]) |
-
1988
- 1988-08-19 JP JP10875888U patent/JPH0233258U/ja active Pending